Published Online: December 2004
Accepted: September 2004
Wavelength tuning of an antenna-coupled infrared microbolometer
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 22, 3133 (2004);
https://doi.org/10.1116/1.1813465
Abstract
Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.15 μm near 10 μm. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees with measured results.
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- © 2004 American Vacuum Society.
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