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No Access Submitted: 24 January 2022 Accepted: 22 April 2022 Published Online: 17 May 2022

  • Electrical properties of p-type Zn:Ga2O3 thin films

Journal of Vacuum Science & Technology A 40, 043401 (2022); https://doi.org/10.1116/6.0001766
Ekaterine Chikoidze1,1,a), Corinne Sartel1, Hayate Yamano2, Zeyu Chi1, Guillaume Bouchez1, François Jomard1, Vincent Sallet1, Gérard Guillot3, Kamel Boukheddaden1, Amador Pérez-Tomás4, Tamar Tchelidze5, and Yves Dumont1
more...View AffiliationsView Contributors
  • Ekaterine Chikoidze
  • Corinne Sartel
  • Hayate Yamano
  • Zeyu Chi
  • Guillaume Bouchez
  • François Jomard
  • Vincent Sallet
  • Gérard Guillot
  • Kamel Boukheddaden
  • Amador Pérez-Tomás
  • Tamar Tchelidze
  • Yves Dumont
ABSTRACT
Ultra-wide bandgap gallium oxide (∼5 eV) has emerged as a novel semiconductor platform for extending the current limits of power electronics and deep ultraviolet optoelectronics at a predicted fraction of cost. Finding effective acceptor dopant for gallium oxide is a hot issue. One element that quite often is considered as a potential candidate is zinc. A number of experimental works have reported the signature of Zn-acceptor, but the direct evidence of hole conductivity was missing. In this work, p-type Zn-doped Ga2O3 thin films were grown by the metal-organic chemical vapour deposition technique on sapphire substrates. By high-temperature Hall effect measurements, Zn related acceptor level ionization energy as 0.77 eV above the valence band maximum was determined. Additionally, we have carried out the simulation study regarding the application of the Zn:Ga2O3 semi-insulating material, to be used as a guard ring for improving the high voltage performance of the Schottky diode structure.

ACKNOWLEDGMENTS

The ICN2 is funded by the CERCA programme/Generalitat de Catalunya and by the Severo Ochoa programme of the Spanish Ministry of Economy, Industry and Competitiveness (MINECO, Grant No. SEV-2017-0706). GEMaC colleagues acknowledge financial support of the French National Agency of Research (ANR), project “GOPOWER” (No. CE-50 N0015-01).

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